2010

Authors

  • Vinh-Nguyen Phan Vinh-Nguyen Phan
  • Nam-Trung Nguyen Nam-Trung Nguyen
  • Chun Yang Chun Yang
  • Pierre Joseph Pierre Joseph
  • Anne-Marie Gué Anne-Marie Gué

nofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the noscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nochannels in silicon and glass. Since the lateral dimension of the channels is limited by the wavelength of UV light used in photolithography, the channel width can only be fabricated in the micrometer scale. However, the depth of the channel can be controlled precisely by the etching rate of reactive ion etching (RIE). Microchannels and access holes were etched with deep reactive ion etching (DRIE). Both nochannels and microchannels were sealed by a Pyrex glass wafer using anodic bonding. The fabricated nochannels were characterized by capillary filling and evaporation experiments. Due to the small channel height and weak fluorescent sigl, fluorescent techniques are not suitable for the characterization of the nochannels. A long exposure time is needed because of the limited amount of fluorescent molecules inhibit the measurement of transient and dymic processes. However, as the channel height is shorter than all visible wavelengths, the contrast in refractive indices of air and liquid allows clear visualization of nochannels filled with liquids. Automatic image processing with matlab allows the evaluation of capillary filling in nochannels. Interesting phenome and discrepancies with conventiol theories were observed.